Granted Patent
Utility
US 4,747,368 · App. 07/035,032
Chemical vapor deposition apparatus with manifold enveloped by cooling means
Inventors:
Guy Brien, Richard M. Cloutier, Edward C. D. Darwall, Laszlo Szolgyemy
Patented Case
View Patent ↗
Granted: May 31, 1988
Filed: Apr 6, 1987
Inventors
Guy Brien
Richard M. Cloutier
Edward C. D. Darwall
Laszlo Szolgyemy
Assignee (at issue)
Mitel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.