Granted Patent
Utility
US 4,748,478 · App. 06/942,369
Projection exposure apparatus
Inventors:
Kyoichi Suwa, Hiroshi Tanaka
Patented Case
View Patent ↗
Granted: May 31, 1988
Filed: Dec 16, 1986
Inventors
Kyoichi Suwa
Hiroshi Tanaka
Assignee (at issue)
Nippon Kogaku K.K.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.