Granted Patent
Utility
US 4,749,440 · App. 07/048,952
Gaseous process and apparatus for removing films from substrates
Inventors:
Robert S. Blackwood, Rex L. Biggerstaff, L. Davis Clements, C. Rinn Cleavelin
Patented Case
View Patent ↗
Granted: Jun 7, 1988
Filed: May 12, 1987
Inventors
Robert S. Blackwood
Rex L. Biggerstaff
L. Davis Clements
C. Rinn Cleavelin
Assignees (at issue)
FSI HOLDINGS, LLC
Texas Instruments Incorporated
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.