Granted Patent
Utility
US 4,751,393 · App. 06/864,584
Dose measurement and uniformity monitoring system for ion implantation
Inventors:
Philip D. Corey, Paul M. Lundquist, Robert V. Brick
Patented Case
View Patent ↗
Granted: Jun 14, 1988
Filed: May 16, 1986
Inventors
Philip D. Corey
Paul M. Lundquist
Robert V. Brick
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.