IP Library Granted Patent US 4,757,689
Granted Patent Utility
US 4,757,689 · App. 06/922,034

Cryopump, and a method for the operation thereof

Inventors: Werner Bachler, Hans-Joachim Forth, Hans-Hermann Klein, Wilhelm Strasser
Patented Case View Patent ↗
Granted: Jul 19, 1988 Filed: Oct 22, 1986
Inventors
Werner Bachler
Hans-Joachim Forth
Hans-Hermann Klein
Wilhelm Strasser
Assignee (at issue)
Leybold-Heraeus GmbH

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Quick Facts
Patent No.
US 4,757,689
App. No.
06/922,034
Filed
1986-10-22
Granted
1988-07-19
Kind
A