Granted Patent
Utility
US 4,758,533 · App. 07/099,792
Laser planarization of nonrefractory metal during integrated circuit fabrication
Inventors:
Thomas J. Magee, John F. Osborne, Peter Gildea, Charles H. Leung
Patented Case
View Patent ↗
Granted: Jul 19, 1988
Filed: Sep 22, 1987
Inventors
Thomas J. Magee
John F. Osborne
Peter Gildea
Charles H. Leung
Assignee (at issue)
XMR, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.