Granted Patent
Utility
US 4,759,626 · App. 06/928,482
Determination of best focus for step and repeat projection aligners
Inventor:
Catherine G. Kroko
Patented Case
View Patent ↗
Granted: Jul 26, 1988
Filed: Nov 10, 1986
Inventor
Catherine G. Kroko
Assignee (at issue)
Hewlett-Packard Company, L.P.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.