IP Library Granted Patent US 4,761,561
Granted Patent Utility
US 4,761,561 · App. 06/933,185

Laser beam scanning pattern generation system with positional and dimensional error correction

Inventors: Yoshihisa Fujiwara, Akikazu Tanimoto, Hisakazu Kato, Manabu Hosoya, Shinji Miura, Fuyuhiko Inoue, Yuichi Aoki
Patented Case View Patent ↗
Granted: Aug 2, 1988 Filed: Nov 21, 1986
Inventors
Yoshihisa Fujiwara
Akikazu Tanimoto
Hisakazu Kato
Manabu Hosoya
Shinji Miura
Fuyuhiko Inoue
Yuichi Aoki
Assignee (at issue)
Nippon Kogaku K.K.

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Quick Facts
Patent No.
US 4,761,561
App. No.
06/933,185
Filed
1986-11-21
Granted
1988-08-02
Kind
A