IP Library Granted Patent US 4,762,767
Granted Patent Utility
US 4,762,767 · App. 06/857,663

Negatively operating photoresist composition, with radiation-absorbing additives

Inventors: Gunther Haas, Karl-Heinz Neisius
Patented Case View Patent ↗
Granted: Aug 9, 1988 Filed: Apr 30, 1986
Inventors
Gunther Haas
Karl-Heinz Neisius
Assignee (at issue)
Merck Patent GmbH

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Quick Facts
Patent No.
US 4,762,767
App. No.
06/857,663
Filed
1986-04-30
Granted
1988-08-09
Kind
A