Granted Patent
Utility
US 4,767,641 · App. 06/881,706
Plasma treatment apparatus
Inventors:
Jorg Kieser, Michael Sellschopp, Michael Geisler
Patented Case
View Patent ↗
Granted: Aug 30, 1988
Filed: Jul 3, 1986
Inventors
Jorg Kieser
Michael Sellschopp
Michael Geisler
Assignee (at issue)
Leybold-Heraeus GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.