Granted Patent
Utility
US 4,769,343 · App. 07/074,835
Single step lift-off technique for submicron gates
Inventors:
Mohammed A. Fathimulla, Thomas C. Loughran, David R. Urech
Patented Case
View Patent ↗
Granted: Sep 6, 1988
Filed: Jul 17, 1987
Inventors
Mohammed A. Fathimulla
Thomas C. Loughran
David R. Urech
Assignee (at issue)
AlliedSignal, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.