Granted Patent
Utility
US 4,770,600 · App. 07/071,958
Apparatus for positioning silicon wafer
Inventor:
Susumu Ishikawa
Patented Case
View Patent ↗
Granted: Sep 13, 1988
Filed: Jul 10, 1987
Inventor
Susumu Ishikawa
Assignee (at issue)
MECS, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.