Granted Patent
Utility
US 4,770,948 · App. 06/877,559
High-purity metal and metal silicide target for LSI electrodes
Inventors:
Hideo Oikawa, Takao Amazawa, Nakahachiro Honna, Hideo Miyazaki, Iwao Kyono, Nobuyuki Mori, Yoshiharu Katoh, Masami Kuroki
Patented Case
View Patent ↗
Granted: Sep 13, 1988
Filed: Jun 23, 1986
Inventors
Hideo Oikawa
Takao Amazawa
Nakahachiro Honna
Hideo Miyazaki
Iwao Kyono
Nobuyuki Mori
Yoshiharu Katoh
Masami Kuroki
Assignees (at issue)
Nihon Kogyo Co., Ltd.
NIPPON TELEGRAPH AND TELEPHONE CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.