IP Library Granted Patent US 4,772,296
Granted Patent Utility
US 4,772,296 · App. 07/049,590

Method of purifying and depositing group IIIa and group Va compounds to produce epitaxial films

Inventor: Thomas M. Potts
Patented Case View Patent ↗
Granted: Sep 20, 1988 Filed: May 12, 1987
Inventor
Thomas M. Potts
Assignee (at issue)
Eagle-Picher Industries, Inc.

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Quick Facts
Patent No.
US 4,772,296
App. No.
07/049,590
Filed
1987-05-12
Granted
1988-09-20
Kind
A