Granted Patent
Utility
US 4,772,846 · App. 06/947,210
Wafer alignment and positioning apparatus for chip testing by voltage contrast electron microscopy
Inventor:
John W. Reeds
Patented Case
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Granted: Sep 20, 1988
Filed: Dec 29, 1986
Inventor
John W. Reeds
Assignee (at issue)
Hughes Aircraft Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.