IP Library › Granted Patent US 4,773,750
Granted Patent Utility
US 4,773,750 · App. 06/939,278

Deep-UV lithography

Inventor: John H. Bruning
Patented Case View Patent ↗
Granted: Sep 27, 1988 Filed: Dec 12, 1986
Inventor
John H. Bruning

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Quick Facts
Patent No.
US 4,773,750
App. No.
06/939,278
Filed
1986-12-12
Granted
1988-09-27
Kind
A