Granted Patent
Utility
US 4,777,062 · App. 06/933,633
Method and apparatus for reactive vapor deposition of metal compounds
Inventor:
Albert Feuerstein
Patented Case
View Patent ↗
Granted: Oct 11, 1988
Filed: Nov 21, 1986
Inventor
Albert Feuerstein
Assignee (at issue)
Leybold-Heraeus GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.