Granted Patent
Utility
US 4,778,331 · App. 07/063,956
Carrier system for silicon wafer
Inventors:
Kazuo Kimata, Susumu Ishikawa
Patented Case
View Patent ↗
Granted: Oct 18, 1988
Filed: Jun 19, 1987
Inventors
Kazuo Kimata
Susumu Ishikawa
Assignee (at issue)
MECS, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.