Granted Patent
Utility
US 4,780,169 · App. 07/048,344
Non-uniform gas inlet for dry etching apparatus
Inventors:
Mark M. Stark, Douglas H. Warenback, David J. Drage
Patented Case
View Patent ↗
Granted: Oct 25, 1988
Filed: May 11, 1987
Inventors
Mark M. Stark
Douglas H. Warenback
David J. Drage
Assignee (at issue)
TEGAL CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.