IP Library › Granted Patent US 4,780,177
Granted Patent Utility
US 4,780,177 · App. 07/152,510

Excimer laser patterning of a novel resist

Inventors: Robert J. Wojnarowski, Charles W. Eichelberger
Patented Case View Patent ↗
Granted: Oct 25, 1988 Filed: Feb 5, 1988
Inventors
Robert J. Wojnarowski
Charles W. Eichelberger
Assignee (at issue)
General Electric Company

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Quick Facts
Patent No.
US 4,780,177
App. No.
07/152,510
Filed
1988-02-05
Granted
1988-10-25
Kind
A