Granted Patent
Utility
US 4,782,028 · App. 07/089,786
Process methodology for two-sided fabrication of devices on thinned silicon
Inventors:
Michael Farrier, James M. Myrosznyk
Patented Case
View Patent ↗
Granted: Nov 1, 1988
Filed: Aug 27, 1987
Inventors
Michael Farrier
James M. Myrosznyk
Assignee (at issue)
Santa Barbara Research Center
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.