Granted Patent
Utility
US 4,782,029 · App. 07/068,125
Method of gettering semiconductor wafers with an excimer laser beam
Inventors:
Kazumi Takemura, Fumitoshi Toyokawa, Masao Mikami
Patented Case
View Patent ↗
Granted: Nov 1, 1988
Filed: Jun 30, 1987
Inventors
Kazumi Takemura
Fumitoshi Toyokawa
Masao Mikami
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.