Granted Patent
Utility
US 4,785,172 · App. 06/947,153
Secondary ion mass spectrometry system and method for focused ion beam with parallel ion detection
Inventors:
Randall L. Kubena, John W. Reeds
Patented Case
View Patent ↗
Granted: Nov 15, 1988
Filed: Dec 29, 1986
Inventors
Randall L. Kubena
John W. Reeds
Assignee (at issue)
Hughes Aircraft Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.