Granted Patent
Utility
US 4,786,166 · App. 07/056,192
Determination of focal plane for a scanning projection aligner
Inventor:
Catherine G. Kroko
Patented Case
View Patent ↗
Granted: Nov 22, 1988
Filed: Jun 1, 1987
Inventor
Catherine G. Kroko
Assignee (at issue)
Hewlett-Packard Company, L.P.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.