Granted Patent
Utility
US 4,786,359 · App. 07/065,746
Xenon enhanced plasma etch
Inventors:
Mark M. Stark, Shu Nakajima, Roger B. Lachenbruch
Patented Case
View Patent ↗
Granted: Nov 22, 1988
Filed: Jun 24, 1987
Inventors
Mark M. Stark
Shu Nakajima
Roger B. Lachenbruch
Assignee (at issue)
TEGAL CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.