Granted Patent
Utility
US 4,789,771 · App. 07/031,519
Method and apparatus for substrate heating in an axially symmetric epitaxial deposition apparatus
Inventors:
McDonald Robinson, Ronald D. Behee, Wiebe B. deBoer, Wayne Johnson
Patented Case
View Patent ↗
Granted: Dec 6, 1988
Filed: Mar 27, 1987
Inventors
McDonald Robinson
Ronald D. Behee
Wiebe B. deBoer
Wayne Johnson
Assignee (at issue)
Epsilon Limited Partnership
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.