Granted Patent
Utility
US 4,795,244 · App. 06/906,986
Projection type exposure apparatus
Inventors:
Makoto Uehara, Koichi Matsumoto, Yutaka Suenaga, Kiyoyuki Muramatsu
Patented Case
View Patent ↗
Granted: Jan 3, 1989
Filed: Sep 15, 1986
Inventors
Makoto Uehara
Koichi Matsumoto
Yutaka Suenaga
Kiyoyuki Muramatsu
Assignee (at issue)
NIKON CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.