Granted Patent
Utility
US 4,798,650 · App. 07/174,348
Method of dry etching aluminum
Inventors:
Moritaka Nakamura, Takashi Kurimoto
Patented Case
View Patent ↗
Granted: Jan 17, 1989
Filed: Mar 28, 1988
Inventors
Moritaka Nakamura
Takashi Kurimoto
Assignee (at issue)
Fujitsu Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.