Granted Patent
Utility
US 4,798,962 · App. 07/016,120
Multi-wavelength projection exposure and alignment apparatus
Inventors:
Koichi Matsumoto, Yutaka Suenaga, Makoto Uehara, Kiyoyuki Muramatsu
Patented Case
View Patent ↗
Granted: Jan 17, 1989
Filed: Feb 18, 1987
Inventors
Koichi Matsumoto
Yutaka Suenaga
Makoto Uehara
Kiyoyuki Muramatsu
Assignee (at issue)
NIKON CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.