Granted Patent
Utility
US 4,801,241 · App. 06/588,029
Modular article processing machine and method of article handling therein
Inventors:
John Zajac, Ninko T. Mirkovich, Thomas M. Rathmann, Roger B. Lachenbruch
Patented Case
View Patent ↗
Granted: Jan 31, 1989
Filed: Mar 9, 1984
Inventors
John Zajac
Ninko T. Mirkovich
Thomas M. Rathmann
Roger B. Lachenbruch
Assignee (at issue)
TEGAL CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.