IP Library › Granted Patent US 4,801,335
Granted Patent Utility
US 4,801,335 · App. 06/920,516

Rinsing in acid processing of substrates

Inventors: Don C. Burkman, David D. Schumacher, Charlie A. Peterson
Patented Case View Patent ↗
Granted: Jan 31, 1989 Filed: Dec 12, 1986
Inventors
Don C. Burkman
David D. Schumacher
Charlie A. Peterson
Assignee (at issue)
FSI HOLDINGS, LLC

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Quick Facts
Patent No.
US 4,801,335
App. No.
06/920,516
Filed
1986-12-12
Granted
1989-01-31
Kind
A