IP Library Granted Patent US 4,805,348
Granted Patent Utility
US 4,805,348 · App. 06/891,241

Flat lapping machine

Inventors: Hatsuyuki Arai, Isao Nagahashi, Seiichi Maeda, Kazumi Yasuda, Shiro Furusawa, Kazuhiko Hirata, Kastunori Nagao, Kazuhiko Kondo, Takaya Sanoki, Misuo Sugiyama, Shinichi Kusano
Patented Case View Patent ↗
Granted: Feb 21, 1989 Filed: Jul 29, 1986
Inventors
Hatsuyuki Arai
Isao Nagahashi
Seiichi Maeda
Kazumi Yasuda
Shiro Furusawa
Kazuhiko Hirata
Kastunori Nagao
Kazuhiko Kondo
Takaya Sanoki
Misuo Sugiyama
Shinichi Kusano
Assignee (at issue)
SPEEDFAM CO., LTD.

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Quick Facts
Patent No.
US 4,805,348
App. No.
06/891,241
Filed
1986-07-29
Granted
1989-02-21
Kind
A