Granted Patent
Utility
US 4,806,987 · App. 07/135,377
Projection-exposing apparatus
Inventors:
Takashi Mori, Koichi Matsumoto, Tsutomu Takai, Masaichi Murakami, Kyoichi Suwa
Patented Case
View Patent ↗
Granted: Feb 21, 1989
Filed: Dec 21, 1987
Inventors
Takashi Mori
Koichi Matsumoto
Tsutomu Takai
Masaichi Murakami
Kyoichi Suwa
Assignee (at issue)
NIKON CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.