IP Library Granted Patent US 4,808,513
Granted Patent Utility
US 4,808,513 · App. 07/035,413

Method of developing a high contrast, positive photoresist using a developer containing alkanolamine

Inventors: Richard M. Lazarus, Kenneth L. Bell, Carla M. Bauer
Patented Case View Patent ↗
Granted: Feb 28, 1989 Filed: Apr 6, 1987
Inventors
Richard M. Lazarus
Kenneth L. Bell
Carla M. Bauer
Assignee (at issue)
Morton Thiokol

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Quick Facts
Patent No.
US 4,808,513
App. No.
07/035,413
Filed
1987-04-06
Granted
1989-02-28
Kind
A