IP Library › Granted Patent US 4,810,346
Granted Patent Utility
US 4,810,346 · App. 07/111,207

Magnetron type sputtering cathode

Inventors: Bernd Wolf, Peter Wirz
Patented Case View Patent ↗
Granted: Mar 7, 1989 Filed: Oct 21, 1987
Inventors
Bernd Wolf
Peter Wirz
Assignee (at issue)
Leybold GmbH

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Quick Facts
Patent No.
US 4,810,346
App. No.
07/111,207
Filed
1987-10-21
Granted
1989-03-07
Kind
A