IP Library › Granted Patent US 4,810,621
Granted Patent Utility
US 4,810,621 · App. 07/008,230

Contact lithographic fabrication of patterns on large optics

Inventors: Prasad R. Akkapeddi, Robert E. Hufnagel
Patented Case View Patent ↗
Granted: Mar 7, 1989 Filed: Mar 27, 1987
Inventors
Prasad R. Akkapeddi
Robert E. Hufnagel
Assignee (at issue)
PerkinElmer, Inc.

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Quick Facts
Patent No.
US 4,810,621
App. No.
07/008,230
Filed
1987-03-27
Granted
1989-03-07
Kind
A