Granted Patent
Utility
US 4,812,650 · App. 07/223,747
Growth rate monitor for molecular beam epitaxy
Inventors:
James N. Eckstein, Christopher Webb, Shang-Lin Weng
Patented Case
View Patent ↗
Granted: Mar 14, 1989
Filed: Jul 15, 1988
Inventors
James N. Eckstein
Christopher Webb
Shang-Lin Weng
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.