Granted Patent
Utility
US 4,813,732 · App. 07/037,098
Apparatus and method for automated wafer handling
Inventor:
David C. Klem
Patented Case
View Patent ↗
Granted: Mar 21, 1989
Filed: Apr 9, 1987
Inventor
David C. Klem
Assignee (at issue)
Epsilon Technology Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.