Granted Patent
Utility
US 4,817,556 · App. 07/046,230
Apparatus for retaining wafers
Inventors:
Eric L. Mears, Richard J. Hertel, Robert V. Brick
Patented Case
View Patent ↗
Granted: Apr 4, 1989
Filed: May 4, 1987
Inventors
Eric L. Mears
Richard J. Hertel
Robert V. Brick
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.