Granted Patent
Utility
US 4,818,358 · App. 07/119,629
Magnetron cathode sputter coating apparatus
Inventors:
Peter Hubert, Barbara Kussel, Peter Wirz
Patented Case
View Patent ↗
Granted: Apr 4, 1989
Filed: Nov 12, 1987
Inventors
Peter Hubert
Barbara Kussel
Peter Wirz
Assignee (at issue)
Leybold-Heraeus GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.