Granted Patent
Utility
US 4,818,561 · App. 07/047,200
Thin film deposition apparatus and method
Inventor:
Thomas L. Strahl
Patented Case
View Patent ↗
Granted: Apr 4, 1989
Filed: May 6, 1987
Inventor
Thomas L. Strahl
Assignee (at issue)
Vaccine Technology Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.