Granted Patent
Utility
US 4,820,106 · App. 07/092,171
Apparatus for passing workpieces into and out of a coating chamber through locks
Inventors:
Michael Walde, Jaroslav Zejda
Patented Case
View Patent ↗
Granted: Apr 11, 1989
Filed: Sep 2, 1987
Inventors
Michael Walde
Jaroslav Zejda
Assignee (at issue)
Leybold-Heraeus GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.