IP Library Granted Patent US 4,820,899
Granted Patent Utility
US 4,820,899 · App. 07/161,944

Laser beam working system

Inventors: Ikuo Hikima, Akira Miyaji, Saburo Kamiya, Akikazu Tanimoto
Patented Case View Patent ↗
Granted: Apr 11, 1989 Filed: Feb 29, 1988
Inventors
Ikuo Hikima
Akira Miyaji
Saburo Kamiya
Akikazu Tanimoto
Assignee (at issue)
NIKON CORPORATION

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Quick Facts
Patent No.
US 4,820,899
App. No.
07/161,944
Filed
1988-02-29
Granted
1989-04-11
Kind
A