Granted Patent
Utility
US 4,824,521 · App. 07/033,961
Planarization of metal pillars on uneven substrates
Inventors:
Vivek Kulkarni, Egil D. Castel
Patented Case
View Patent ↗
Granted: Apr 25, 1989
Filed: Apr 1, 1987
Inventors
Vivek Kulkarni
Egil D. Castel
Assignee (at issue)
FAIRCHILD SEMICONDUCTOR CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.