IP Library Granted Patent US 4,824,545
Granted Patent Utility
US 4,824,545 · App. 07/134,362

Apparatus for coating substrates

Inventors: Manfred Arnold, Peter Wirz
Patented Case View Patent ↗
Granted: Apr 25, 1989 Filed: Dec 17, 1987
Inventors
Manfred Arnold
Peter Wirz
Assignee (at issue)
Leybold GmbH

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Quick Facts
Patent No.
US 4,824,545
App. No.
07/134,362
Filed
1987-12-17
Granted
1989-04-25
Kind
A