Granted Patent
Utility
US 4,826,754 · App. 07/042,932
Method for anisotropically hardening a protective coating for integrated circuit manufacture
Inventor:
Stephen M. Bobbio
Patented Case
View Patent ↗
Granted: May 2, 1989
Filed: Apr 27, 1987
Inventor
Stephen M. Bobbio
Assignee (at issue)
Microelectronics Center of North Carolina
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.