Granted Patent
Utility
US 4,828,751 · App. 07/090,661
Solvent composition for cleaning silicon wafers
Inventor:
Paul Kremer
Patented Case
View Patent ↗
Granted: May 9, 1989
Filed: Aug 28, 1987
Inventor
Paul Kremer
Assignee (at issue)
PCR, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.