Granted Patent
Utility
US 4,828,872 · App. 06/906,225
Method and apparatus for the reactive vapor depositing of metal compounds
Inventors:
Volker Bauer, Albert Feuerstein, Klaus Hartig, Gerhard Kienel, Helmuth Lammermann, Wolfgang Zirkel
Patented Case
View Patent ↗
Granted: May 9, 1989
Filed: Sep 11, 1986
Inventors
Volker Bauer
Albert Feuerstein
Klaus Hartig
Gerhard Kienel
Helmuth Lammermann
Wolfgang Zirkel
Assignee (at issue)
Leybold-Heraeus GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.