Granted Patent
Utility
US 4,828,965 · App. 07/141,136
Aqueous developing solution and its use in developing positive-working photoresist composition
Inventors:
Richard James West, Stephen F. Marcotte, Jr., Faris Modawar
Patented Case
View Patent ↗
Granted: May 9, 1989
Filed: Jan 6, 1988
Inventors
Richard James West
Stephen F. Marcotte, Jr.
Faris Modawar
Assignee (at issue)
Olin Hunt Specialty Products, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.