Granted Patent
Utility
US 4,831,272 · App. 07/167,725
Apparatus for aligning a reticle mark and substrate mark
Inventor:
Yuji Imai
Patented Case
View Patent ↗
Granted: May 16, 1989
Filed: Mar 14, 1988
Inventor
Yuji Imai
Assignee (at issue)
NIKON CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.